Deutsche Version

Vacuum chambers



Type: Process chamber
Volume: 120 litres
Surface: Fine-blasted with glass beads inside and
outside
Features: Cooling tubes outside

EDIS is a specialist in the manufacture of vacuum chambers. Our services extend from fabrication to the customerís design documents, consultations and planning the chamber configuration to the complete construction of the chambers. We offer a wide range of surface treatment methods, e.g. fine blasting with glass beads, roughening, sanding, electropolishing etc. and subject each vacuum chamber to a test of tightness to customer specification.

On this page, you can see a number of examples of vacuum chambers produced to date.


Type: Process chamber
Volume: 120 litres
Surface: Fine-blasted with glass beads inside and outside
Features: Cooling tubes outside

Type: Process chamber
Volume: 900 litres
Surface: Fine-blasted with glass beads inside and outside
Features: Cooling ribs outside

Type: PECVD process chamber
Volume: 4,000 litres
Surface: Ground inside ‹Rz 6.3, fine-blasted with glass beads outside
Features: Insulated outside

Type: PVD process chamber
Volume: 2,800 litres
Surface: Ground inside ‹Rz 6.3, fine-blasted with glass beads outside
Features: Insulated outside


Type: Process chamber
Volume: 6,800 litres
Surface: Ground inside ‹Rz 6.3, fine-blasted with glass beads outside
Features: Doubled walled and water-cooled

Type: Charging chamber
Volume: 100 litres
Surface: Coated with vacuum-compatible paint inside, powder-coated outside